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HLUP
ZYZL
ZYZL-HLUP
Applications of Pressure transducer
- OEM customer
- Semiconductor
- Solar PV
- Specialty Gas
Introduction of Pressure transducer
HLUP Ultra High Purity pressure transducer continue to push the boundaries of ultrahigh-purity (UHP) pressure measurement performance, provides reliable, clean, and consistent flow and pressure measurement solution at high temperatures and speeds.
Ultra High Purity pressure transducer Compliance with SEMI F19, Ra<0.13 μm, 100 Helium leak test and packed in class 100 clean room, it provides semiconductor chip fabricators, foundries, and the mechanical contractors and gas/chemical suppliers who support them with a variety of general industrial fluid pressure measurement system products that deliver reliable performance in semiconductor manufacturing applications.
Special features of Pressure transducer
·Wet parts apply all stainless steel welding excellent corrosion resitance
·Output 4~20mA
·Wet parts apply all stainless steel welding excellent corrosion resitance
·Strong anti-interference and excellent long-term stability
·Digital circuit compensation
·All wetted parts are electro-polished accord to SEMl F19, Ra≤0.13um
·100% Helium leak tested and packed in class 100 clean room
·Accuracy up to 0.1%BFSL(include linearity, hysteresis and repeatability)
·Various type of VCR connection available: male, female, fixed and swivel
Accuracy | 0.15%BFSL @25C(include linearity, hysteresis and repeatability) |
Pressure range | 0...80psi-0...5000psi(include vacuum) |
Over pressure | 2 times of full scale |
Burst pressure | 5 times of full scale |
Long term stability | max 0.25%FS/year |
Thermal drift | max 0.25%FS/10℃(-20...+85℃) |
Leakage test | <1*10-9 mbar L/S |
Response time | <1.5mS |
Output signal | 4-20mA 2-wire |
Power supply | 10-30VDC |
Load resistance | ≤(Us-10V)/0.02A Ω |
Insulation resistance | >100MQ @ 250VDC |
Ambient temperature | -20 ...85°C |
Media temperature | -20 .. 140℃ |
Storage temperature | -30 ... 85°C |
Ingress protection | IP67 EN60529 |
Ambient humidity | <95 % RH, non-condensation |
Sensor material | 17-4PH |
Wetted parts | 316LSS |
Housing material | 304SS |
Electrical connection | M12*1(4 pins) |
Process connection | 9/16"-18UNF(1/4"VCR) female, male, fixed, swivel |
Surface finish | Ras≤0.13um(typical) Ras≤0.18um(max) |
Explosion proof | Ex na lC T4/T5/T6 Gc |
Dimension in mm |
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Wiring connection |
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HLUP Series | ||
Output signal | 1 | 4-20mA 2-wire |
Electrical connection | 1 | M12*1(4 pins) |
Connection type | 1 | Swivel thread |
2 | Fixed thread | |
Thread type | M | Male |
F | Female | |
Pressure range | XXXXX | Please refer the range code table in page 2 |
Z | Customized | |
Explosion proof | S | None |
X | Ex nA IIC T4/T5/T6 |
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